http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000088887-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5ab085b6eb9c69a9de12f3570128640 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_584faa8afcca7ca79753b1c4cba1361a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1998-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d270b1b5b28fab15301fd6152924bbc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8c8f253a5896803301d8d729172f6ac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08ccc2145dd4521b281437b848e704a2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70dde134dc29d2a2ae5d501bdda96b27 |
| publicationDate | 2000-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000088887-A |
| titleOfInvention | Membrane type probe device |
| abstract | (57) [Problem] To provide a membrane-type flow device capable of testing a semiconductor device having a complicated electrode arrangement by bringing a probe into contact with each electrode. SOLUTION: A spherical membrane is arranged on a membrane member so as to correspond one-to-one with the electrode arrangement of a semiconductor device to be tested, and the semiconductor device can be tested by contacting these spherical projections with each electrode. A shaped probe device is obtained. Since the spherical projection has a configuration in which a tungsten core is plated and is extremely small, it can be electrically connected to each electrode even if the electrode pitch is extremely narrow. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010076322-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6628127-B2 |
| priorityDate | 1998-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964 |
Total number of triples: 19.