http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000086384-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_06f6859e19dacec5a834168e491504b2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-00 |
| filingDate | 1998-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_419f29bf890b36d7589c1cc1ce78a15b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a069910c2ef1cd880daf193c4ce8a276 |
| publicationDate | 2000-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000086384-A |
| titleOfInvention | Silicon single crystal pulling method |
| abstract | (57) [Summary] Even if the V / G 1 value enters an interstitial silicon type glow-in defect region, the concentration of supersaturated interstitial silicon can be kept low, and the aggregation start temperature can be lowered. Further, the size of the dislocation cluster can be reduced. SOLUTION: A silicon single crystal 11 is pulled up from a silicon melt 13 stored in a quartz crucible 14. When the pulling speed of the silicon single crystal 11 is V (mm / min) and the temperature gradient in the crystal axis direction in the temperature range from the melting point of silicon to 1300 ° C. is G 1 (° C./mm), the silicon single crystal 11 In all positions from the center to the outer periphery, 0.18 (mm 2 / min · ° C.) ≦ V / G 1 <0.2 (m m 2 / min · ° C.) to pull up the silicon single crystal 11. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005015287-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0215253-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4496723-B2 |
| priorityDate | 1998-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.