http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000086291-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fbcd2a70a3c49d0aed69a000d55909 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-22 |
| filingDate | 1998-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42c6164867b3bdc8768e2762b793c831 |
| publicationDate | 2000-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000086291-A |
| titleOfInvention | Pattern formation method |
| abstract | (57) [Problem] To provide a pattern forming method with good pattern forming property using a ceramic material. SOLUTION: A photosensitive resin composition layer is provided on a substrate, After providing a predetermined recess by exposure and development, in the recess, A pattern forming method in which a ceramic material-containing organic paste containing a thermosetting resin having an unsaturated double bond at an end as an organic binder is embedded and then fired. |
| priorityDate | 1998-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 150.