http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000065702-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cc8da0251ed99dc46dbf403cfd9d4418 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 |
| filingDate | 1998-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b929bfa3f819597d83941f229d8b9753 |
| publicationDate | 2000-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000065702-A |
| titleOfInvention | Low voltage discharge type plasma ion deposition system |
| abstract | (57) [Problem] In a plasma ion film forming apparatus for forming an organic synthetic film or an osmium film on a sample surface, a sample is formed without damage to the sample by lowering a discharge voltage and increasing a plasma density. Of plasma ion deposition system with high speed. SOLUTION: A negative electrode 2 is a hollow cathode type, and a DC voltage is applied between the negative electrode 2 and an opposed anode electrode 3 so that the same discharge current can be obtained at a voltage less than half of that of a conventional parallel electrode type diode discharge. By utilizing the fact that the generated plasma is confined in the cup-shaped cathode and the plasma ion density is increased, an organic synthetic film or a metal osmium film is placed on the surface of the sample S placed in the hollow cathode. And a plasma ion film forming apparatus capable of efficiently generating ions without ion damage. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011144418-A |
| priorityDate | 1998-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.