http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000054169-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be92719b856db86c092cc233e9512ca2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate | 1998-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb2a9a4ad2ac82e30a6d3af4c009da9b |
| publicationDate | 2000-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000054169-A |
| titleOfInvention | Fine processing device and fine processing method |
| abstract | (57) [Problem] To accurately form an array of concave lenses or an array of micro prisms having a linear slope, that is, a so-called sawtooth shape, even when the element pitch is reduced to several μm. Provided are a microfabrication apparatus and a microfabrication method that can be manufactured at a time. SOLUTION: A substrate holding means 5 for holding a substrate 4 as an etching target on which an etching mask layer is formed. Ion etching means 3 for etching the surface of the substrate with an ionized etching gas; light irradiation means 7 for irradiating the substrate with light from the back side of the surface to be etched of the substrate 4; ion etching means 3; Control means 8 for controlling the means 7. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014164152-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9090499-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021137274-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002321941-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03045617-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013199425-A |
| priorityDate | 1998-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.