http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000039712-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 |
| filingDate | 1998-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cf544b8e6cea96e07906d131aaca220 |
| publicationDate | 2000-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000039712-A |
| titleOfInvention | Master plate for mask making |
| abstract | PROBLEM TO BE SOLVED: To provide a photopolymerization layer which has high sensitivity to visible light such as argon, FD-YAG, helium-neon laser, etc., has high resolution and provides excellent film properties. Provide an original plate for making a mask. SOLUTION: A metal thin film is provided on a transparent support, on which a thermoplastic polymer binder, an ethylenically unsaturated compound, and a compound represented by formulas (I) to (III) are selected. An original plate for producing a mask, comprising a photopolymerization layer containing at least one sensitizing dye and a radical polymerization initiator. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100655048-B1 |
| priorityDate | 1998-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 618.