| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-343 |
| filingDate |
1998-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3901b81894fb6ab714ef866e4b8bda7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65594fef09bd1fc27792a3dc7ffc8872 |
| publicationDate |
2000-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000031595-A |
| titleOfInvention |
Optical semiconductor device, method for manufacturing optical semiconductor device, and apparatus for manufacturing the same |
| abstract |
(57) Abstract: When simultaneously manufacturing devices having different wavelengths in the same semiconductor substrate by using MOVPE selective growth, highly uniform device characteristics are obtained and the wavelength range is expanded. SOLUTION: A first step of forming a plurality of rows of a pair of growth inhibiting masks 2 in a stripe shape on a semiconductor substrate 100; In the voids of the growth inhibition mask 2 by metal organic chemical vapor deposition In a method for manufacturing an optical semiconductor device including a second step of selectively forming a group III / V compound semiconductor layer composed of a group III element and a group V element, in the second step, III / V A method for manufacturing an optical semiconductor device, wherein a group III / V compound semiconductor layer is selectively formed using crystal growth conditions such that the group V mixed crystal composition of the group III compound semiconductor layer is distributed in the substrate plane. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10637211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003086890-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10693033-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004079867-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10396106-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016508668-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10388823-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017208543-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11004876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016042534-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011254078-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003303993-A |
| priorityDate |
1998-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |