| abstract |
(57) [Problem] To improve the measurement accuracy of a detection electrode by avoiding the influence of pulsation of exhaust pressure generated in a gas to be measured. A first diffusion-controlling part for imparting a predetermined diffusion resistance to a gas to be measured introduced into a first chamber is provided. A slit 30 formed in a front end portion of the second spacer layer 12e at a portion in contact with the lower surface of the second solid electrolyte layer 12f with the same opening width up to the first chamber 18; A horizontally long opening formed in a front end portion of the second spacer layer 12e and a portion in contact with the upper surface of the first solid electrolyte layer 12d has a slit 32 formed with the same opening width up to the first chamber 18. Make up, slits 30 and 3 2 have substantially the same cross-sectional shape, the vertical length is 10 μm or less, and the horizontal length is about 2 mm. |