| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_129e393582e6bdf4029baf2206522f45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
1998-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcea9769f2a45f073fcc91f46ce42773
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_065bcd91484ef41b61d498bbdd48bb04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdda30bfe9db60b043f624c424575043 |
| publicationDate |
2000-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000026840-A |
| titleOfInvention |
Abrasive |
| abstract |
(57) [Problem] To provide a polishing material which is excellent in mass productivity by improving the polishing rate of a polishing material in which conventional silica is added as abrasive grains. The number average particle diameter of primary particles is from 0.01 to 0.1. 5 μm and a diffraction angle of 28.6 ° (1 11) A cerium oxide powder comprising a cerium oxide powder having a half-value width 2θ (゜) of 0.7 to 0.15 °. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8323604-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0248280-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7470297-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8439995-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022135607-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1300276-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0224827-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103509472-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009280480-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008515764-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6776811-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6585787-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015120844-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6986798-B2 |
| priorityDate |
1998-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |