http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000015046-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_663cad2cddb9415ae5ba8d9c99803cda |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-81 |
| filingDate | 1998-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62a988e31928a1113fe98351f8fddd5f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0c3997dbd3d889d49e9053532059730 |
| publicationDate | 2000-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000015046-A |
| titleOfInvention | Chemical filter |
| abstract | An object of the present invention is to provide a chemical filter that efficiently removes harmful ionic substances and that minimizes recontamination in a clean room. The present inventors have studied and found that, in a chemical filter for removing harmful ionic substances, of a gas component generated from the chemical filter in a gas phase, This problem has been solved by a chemical filter characterized in that the volatilization amount of the compound having a phenolic hydroxyl group is one half or less of the volatilization amount of toluene. Further, in the chemical filter for removing harmful ionic substances, the volatile component adsorbed on the chemical filter until at least the volatilization amount of the compound having a phenolic hydroxyl group under reduced pressure becomes less than half of the volatilization amount of toluene. The above problem has been solved by a chemical filter characterized by removing the above. |
| priorityDate | 1998-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.