http://rdf.ncbi.nlm.nih.gov/pubchem/patent/IL-211576-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K- http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L- |
filingDate | 2011-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2014-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | IL-211576-A |
titleOfInvention | Barrier night for low k dielectrics |
priorityDate | 2008-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 156.