| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3d6fa926ef6ac3947565c2d90afae18 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2035-0872
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-14 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C35-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 |
| filingDate |
1994-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2001-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
IL-111664-A |
| titleOfInvention |
Methods and device for modifying materials by ion beams |
| abstract |
A method for surface treating a material, comprising the step of irradiating a surface (13) of the material with a repetitively pulsed ion beam (11), wherein the pulsed ion beam has a duration o 1000 ns at the accelerating gap in the ion beam source and a repetition rate L 1HZ. |
| priorityDate |
1993-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |