| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23ba9f1b163682046ffe20a168fee68e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F1-15383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09B9-326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09B9-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F1-153
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1988-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e68cf2ba61c5d69234dbeed1d8f265ca |
| publicationDate |
1995-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
IE-63705-B1 |
| titleOfInvention |
Spin castable mixtures useful for making deep-uv contrast enhancement layers |
| abstract |
Spin castable mixtures are provided which are useful for applying onto photoresist surfaces to produce a contrast enhancement layer employing α-alkyl-N-alkyl nitrones in combination with an inert organic binder and solvent. The α-alkyl-N-alkyl nitrones can be used with 200-300 nanometers UV light. |
| priorityDate |
1987-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |