http://rdf.ncbi.nlm.nih.gov/pubchem/patent/IE-20060330-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_784abf88c85b7cae2bd7376de3611c93 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-00 |
| filingDate | 2006-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f656eba6f25383d4a1e66fc1dea1b4a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68b4dd350eb329758893aa29856dc9aa |
| publicationDate | 2006-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | IE-20060330-A1 |
| titleOfInvention | Deposition of materials |
| abstract | A liquid injection system (10) receives a flow of host material in liquid precursor form and forms the liquid flow into a spray, which is delivered by a head (4) in a chamber (3). Nano-particle carrier liquid injector systems (11,12) receive flows of nano-particles dispersed in liquid carriers, and form the liquid into a spray which is also delivered over the substrate wafer by the spray head (4). The sprayed material material forms a deposit on the substrate in the chamber. A UV source (5) is operated so that the deposited material forms a layer on the substrate. The layer comprises nano-particles embedded in the host material. <Figure 1> |
| priorityDate | 2005-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.