http://rdf.ncbi.nlm.nih.gov/pubchem/patent/HU-199021-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df8b6fb9e11a82bdaa6e6b8737bc630b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1985-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4296699ec19de50d4b047ad5945d0d11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85f1451c3b819fb7f685eede9843363d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e8a220dc95c8f2eea6a9abdcfc7f6c0 |
| publicationDate | 1989-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | HU-199021-B |
| titleOfInvention | Method and measuring arrangement for detecting deep levels of semiconductive materials, particularly monocrystal segments by nondestructive way |
| abstract | The present invention relates to a method for detecting non-destructively non-destructive detection of the deep levels of semiconductor materials, in particular single crystal slices, by means of differential deep node transient spectroscopy, in which a Schottky transition is formed and a closed area preload is generated. The sample is excited by periodic pulses, and after the excitation ceases, the transient response of the sample returning to the thermodynamic equilibrium is detected. The invention further relates to a measuring arrangement for detecting non-destructively non-destructive detection of deep levels of semiconductor materials, in particular one-crystal slices, by differential deep-nose transient spectroscopy, the sample holder of the sample to be tested, in which the sample forms a measuring guard and excites the measuring circular excitation. a measuring unit is connected and a signal processing and evaluation unit is connected to the output of the measuring unit. In this measurement arrangement, there is also one unit for determining the timing and operation control of all units. The sample holder (2), the Peltier element (15.1, hollow block (16) connected to its opposite side 30, the gas feeder 5 connected to the interior of the array, the snow sensor connected to the leading plate), connected to the other side of the slice (12) placed thereon. and a liquid metal receiving reservoir, the reservoir travels through a sample trough (inside a passageway (5, 6) formed in the interior of the sample holder 21) formed on the childrens of the sample holder 10 (2) and the scope of the description contained therein: 9 pages, 3 drawing, Figure 6 HU 199021 |
| priorityDate | 1985-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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