http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-834821-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f261780217da1bf6c1b39ab661cb26d7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-14 |
| filingDate | 1956-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1960-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | GB-834821-A |
| titleOfInvention | Improvements in and relating to methods and apparatus for jet electrolytic etching orplating |
| abstract | 834,821. Electrolytic jet-etching. PHILCO CORPORATION. June 19, 1956 [June 23, 1955; Jan. 17, 1956], No. 18921/56. Class 41. A method of treating a body of semi-conductive material by directing on to the said body a jet of liquid electrolyte carrying an electrical current which method includes maintaining a pressure gradient in the atmosphere region overlying the area of impingement of the liquid column of the electrolyte on the body in such a manner as to prevent the accumulation of electrolyte at said area which would otherwise form a coherent liquid body surrounding the end of the liquid column. The electrolyte may be such as to cause electroplating of the surface or such as to cause etching thereof. A jet of very fine diameter may be used. Aqueous or non-aqueous electrolytes may be used. Specified electrolytes are aqueous solutions of sodium nitrate, sodium chloride, potassium nitrate, sodium potassium sulphate or nitric acid. The workpiece may be of germanium. As shown, a workpiece 10 is positioned between opposing jets of electrolyte 19 and 20 issuing from nozzles 21 and 22, having apertures of extremely small diameter. Electric current is supplied to the jets and to the workpiece by means not shown. Suction nozzles 35 and 36 are positioned close to each side edge of the workpiece 10 for producing an area of reduced pressure in the region of the periphery of the areas of impingement of jets 19 and 20 upon the workpiece. The low-pressure area causes a flow of air in a direction generally parallel to the jets and then across the faces of the workpiece 10 carrying a smooth thin flow of electrolyte across the faces of the workpiece and into nozzles 35 and 36. Electromagnetic waves may be transmitted during etching through that surface portion of the semi-conductor body which is being etched and the waves may be used for measuring the remaining thickness of the body at the part being etched, in the manner disclosed in Specification 817,953. Specifications 814,364 and 824,484 also are referred to. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4289947-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2640213-C1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2384865-A1 |
| priorityDate | 1955-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.