| abstract |
A method of depositing a material on a substrate 328 comprises generating a plasma remote from one or more sputter targets 303, 304 comprising an alkali metal, an alkaline earth metal, an alkali metal-containing compound, an alkaline earth metal-containing compound or a combination thereof and sputtering material from the one or more targets onto the substrate using the plasma, wherein the working distance between the one or more targets and the substrate is within +/- 50% of the theoretical mean free path of the system. The alkali or alkaline earth metal-containing compound may take the form of a layered oxide material and may be lithium cobalt oxide. The method may be used to manufacture a solid-state battery comprising multiple stacked cathode, electrolyte and anode layers. A method of determining the optimum working distance for a remote plasma deposition system comprises depositing material on test specimens using a range of working distances and performing X-ray diffraction on the specimens. A method of determining the optimum range of working pressures for a remote plasma deposition system comprises depositing a material on test specimens using a range of working pressures and performing a characterisation technique on the specimens. |