| abstract |
A valve (101) has a lower valve housing (192), a diaphragm (120), and an upper valve housing (191). The top surface of a piezoelectric pump (10) is attached to the bottom surface of the lower valve housing (192). In the diaphragm (120), a round hole (121) is disposed in the center of an area facing a projection (138) of the lower valve housing (192). The diaphragm (120) is attached to the upper valve housing (191) and the lower valve housing (192), and divides the inside of a valve housing (130), thereby forming a first lower valve chamber (131), a second lower valve chamber (132), a first upper valve chamber (133) and a second upper valve chamber (134). A groove (14) is disposed inside a wall (190) of the upper valve housing (191), which faces the diaphragm (120), in the first upper valve chamber (133). |