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publicationDate 2014-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber GB-2487130-B
titleOfInvention Bilayer systems including a polydimethylglutarimide-based bottom layer and compositions thereof
abstract Bilayer systems include a bottom layer formed of polydimethylglutarimide, an acid labile dissolution inhibitor and a photoacid generator. The bilayer system can be exposed and developed in a single exposure and development process.
priorityDate 2009-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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