http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2444823-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-00 |
| filingDate | 2007-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830b8c370f2092414da814524918af24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_811c9e6e856f6d34daba788e2d6e8199 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2a9aacf507db12b95a8f92ddad3e63f |
| publicationDate | 2008-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | GB-2444823-A |
| titleOfInvention | Chemically amplified resist composition |
| abstract | The present invention provides a chemically amplified resist composition comprising: (A) a salt represented by the formula (I): <EMI ID=1.1 HE=16 WI=46 LX=515 LY=217 TI=CF> <PC>wherein R<21> represents a C1-C30 hydrocarbon group or the like, Q<1> and Q<2> each independently represent a fluorine atom etc., and A<+> represents at least one organic cation selected from a cation represented by the formula (Ia): <EMI ID=1.2 HE=15 WI=37 LX=505 LY=664 TI=CF> <PC>wherein P<1>-P<3> each independently represent a C1-C30 alkyl group or the like, a cation represented by the formula (Ib): <EMI ID=1.3 HE=16 WI=58 LX=498 LY=1016 TI=CF> <PC>wherein P<4> and P<5> each independently represent a hydrogen atom or the like, and a cation represented by the formula (Ic): <EMI ID=1.4 HE=62 WI=108 LX=494 LY=1314 TI=CF> wherein P<10>-P<21> each independently represent a hydrogen atom or the like, B represents a sulfur or oxygen atom and m represents 0 or 1; (B) a salt represented by the formula (II): wherein R<22> represents a C1-C30 hydrocarbon group or the like, Q<3> and Q<4> each independently represent a fluorine atom or the like, and A'<+> represents an organic cation represented by the formula (IIa): wherein P<6> and P<7> each independently represent a C1-C12 alkyl group or the like, P<8> represents a hydrogen atom, P<9> represents a C1-C12 alkyl group or the like; and (C) a resin which contains a structural unit having an acid-labile group and which itself is insoluble or poorly soluble in an aqueous alkali solution but becomes soluble in an aqueous alkali solution by the action of an acid. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9631048-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101921219-A |
| priorityDate | 2006-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 246.