| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 |
| filingDate |
2004-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6155ec152ca745e16c9f253c82d9dfa4 |
| publicationDate |
2005-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
GB-2412488-A |
| titleOfInvention |
Ion sources |
| abstract |
The invention relates to methods of controlling the effect of ions of an ionisable source gas that can react with interior surfaces of an arc chamber 14, by introducing ions of a displacement gas 47 into the arc chamber, where the displacement gas 47 ions are more chemically reactive with the material of the interior surfaces than the ions of the source gas 46. The source gas 46 ions are oxygen ions and the displacement gas ions are fluorine ions where the interior surfaces comprise tungsten. The fluorine ions may, by way of example, be sourced from fluorine, silicon tetrafluoride or nitrogen trifluoride. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7819981-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8603252-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9991095-B2 |
| priorityDate |
2004-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |