patent/GB-2395493-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2395493-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_90bba6a0ee7b1b40ba5b047e86b2997e
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classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49894 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
classificationIPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-498 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
filingDate	2002-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4482b83a5b731528774156c098ace4a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15df1614766eabbffbdf1656f8284003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1736b720f9a12491b4ddf3dc118dbab0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbb500cabb851e1efd145d1edc6d5ad3
publicationDate	2004-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	GB-2395493-A
titleOfInvention	Forming low K dielectric layers
abstract	A low k dielectric layer is formed by depositing an unset dielectric layer on a substrate, the dielectric layer including Silicon, Carbon and Oxygen. The surface of the dielectric layer exposed to an activated gas to form a semi-permeable skin on or of the surface of the layer. The layer is then cured to render at least part of the layer porous.
priorityDate	2001-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0684642-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0687004-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291

Total number of triples: 37.