http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2369241-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d527f9a5c3e991a1797de3518a88d14 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-153 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate | 2000-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3c7de34646f330f9b80c79439b75534 |
| publicationDate | 2002-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | GB-2369241-A |
| titleOfInvention | Charged particle beam exposure device with aberration correction |
| abstract | Charged particle beam exposure device including a lens 42, an aperture plate 50 to divide the beam into sub-beams and deflecting electrodes 51-56 to correct an aberration of the lens by deflecting the sub-beams. The aperture plate may comprise a first aperture through which the optical axis of the lens passes and a second aperture around the periphery of the first where only the sub-beam generated by the second aperture is deflected. The first aperture may be circular and the second aperture may be annular. The device may comprise an ozone supply unit. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10096448-B2 |
| priorityDate | 1999-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.