http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2285337-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-185 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-18 |
| filingDate | 1994-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_863b40a02da21dd6542fe2e7a410bf6e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58e8551231e78fa4220979c96240f1eb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dc515c048fca8f9a488128d445fee0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf3e3bd364b816797e8e0e4cdbc8a412 |
| publicationDate | 1995-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | GB-2285337-A |
| titleOfInvention | Manufacture of semiconductor device with aluminium wiring |
| abstract | A strong tendency of exhibiting the (1 1 1) plane appears in an Al film sputtered on a substrate surface without heating the substrate intentionally, although the size of Al grains is small. Thereafter, in the midst of Al film deposition, the substrate is heated while continuing formation of the Al film. With this later process, the size of Al grains increases while inheriting the strong tendency of orientating the (1 1 1) plane, and a resistance to electromigration is improved. The Al film is patterned by using chlorine-based gas etchant and then heated in vacuum so that residual chlorine can be vaporized. Alternatively, the Al film is processed by silver nitrate or lead nitrate solution so that residual chlorine can be changed to inactive substrate which is soluble to ammonium hydroxide. The method is particularly applicable to making a DRAM wiring pattern 20, 23. <IMAGE> |
| priorityDate | 1993-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.