http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2253051-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a158f8a76956cdc584468d33bb34b450 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-227 |
| filingDate | 1991-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab528f7c892f7d3043831300ace5760b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a8db7840d7b07efa60d030966b17199 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_232cbc65828e282dd36a8385267eee0e |
| publicationDate | 1992-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | GB-2253051-A |
| titleOfInvention | Photoemission contaminant detection |
| abstract | For determining the presence, and measuring the thickness of a contaminant layer on the surface of an electrically conductive material (33) such as a semiconductor, a metal or a metal silicide, a change in photoemission current from an illuminated spot on the surface is used to determine the presence and extent of a contaminant layer at the illuminated site (39). Compensation is provided for the effects of capacitive current and photovoltaic current. A pattern of illumination sites (39) on the surface of the conductor (33) can cover all points on the surface. <IMAGE> |
| priorityDate | 1989-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.