http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2222270-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate | 1989-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3572fe5f4010b486410b45f5467a2a2a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7781c815ad86ec41feb2a543fffc8f68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f08ea87295ed56b59dae70df070c234 |
| publicationDate | 1990-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | GB-2222270-A |
| titleOfInvention | Developer solution for positive-working resist composition |
| abstract | A developer solution for developing a positive-working resist composition comprising an alkali-soluble novolac resin and a naphthoquinone diazide compound, the developer comprising (a) water (b) a water-soluble organic alkali and (c) an alkali-soluble organic cyclic nitrogen compound such as N-hydroxyethyl piperazine, N-methyl-4-piperidone, 1,3-dimethyl- 2-imidazol-idinone added in a concentration of 0.1-10% by weight to a conventional developer solution of (a) plus (b); tetramethyl ammonium hydroxide or choline being preferred as the water-soluble alkali. |
| priorityDate | 1988-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 95.