| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03C1-72 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate |
1988-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f7dd25f28318bbb719403b5297fe6fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfaa2d1d8d925f8510f41f6eb967252b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f08ea87295ed56b59dae70df070c234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e894e6a63f5bdb743ef7beddc23c5eda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_042dbdedb708cde8839f4a19296a08fa |
| publicationDate |
1989-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
GB-2217864-A |
| titleOfInvention |
A positive-working photosensitive composition |
| abstract |
A positive-working photosensitive composition useful as a photoresist material comprises (A) a film-forming resin, such as a novolak resin, (B) a photosensitive compound such as a quinone diazide, and (C) anesterification product of curcumin with 1,2-naphthoquinone diazide sulfonic acid preferably in an amount of 0.5-20% by weight of total weight of (A) fibres (B). The photosensitive composition is outstandingly insusceptible to the adverse influence of halation even when the photoresist layer is formed on a highly reflective aluminium-deposited substrate surface without decreasing the photosensitivity of the composition to actinic rays in a photolithographic process for the manufacture of semiconductor devices. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5958645-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0827024-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0827024-A2 |
| priorityDate |
1988-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |