| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d27c73f5800345cf213727c5f960d899
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_48ae6a4318fc6578798fe46bf45ab965 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J65-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J65-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
1986-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_531f9b45ff2e5716c82593f817c056c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00eee5b534748aeb859a2aac201e04ea |
| publicationDate |
1987-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
GB-2183087-A |
| titleOfInvention |
A method and apparatus for producing an hf-induced noble-gas plasma |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0450727-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9110984-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5062708-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2234655-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0514585-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5280252-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0514585-A2 |
| priorityDate |
1985-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |