| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7d54ad0f64ffd3e3744dcc067fbd2a5d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02549
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02398
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0617
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02411
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 |
| filingDate |
1986-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fee9a95805b9300c1c1562e023319d3e |
| publicationDate |
1987-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
GB-2181461-A |
| titleOfInvention |
Depositing semiconductor compounds by reactive sputtering |
| abstract |
A new technique for the deposition of compound semiconductors namely; metalorganic magnetron sputtering (MOMS), in which the reactive substance is a metalorganic vapour. In particular, there is described the deposition of the III-V semiconductor indium antimonide from a high purity antimony target R.F. magnetron sputtering, where the reactive vapour is trimethylindium. The indium/antimony ratio of the films has been found to depend linearly on the trimethylindium flow rate and the indium/argon emission peak ratio of the plasma. <IMAGE> |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102011003941-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8258003-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-616894-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2655059-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0299752-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0299752-A2 |
| priorityDate |
1985-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |