| abstract |
A radiation-sensitive composition and method of crosslinking, suitable for use as a resist or litho plate composition comprises a polymer comprising a recurring unit having a moiety having an epoxy, carboxyl, hydroxy, tertiary amino, morpholino, unsaturated nitrogen-containing heterocycle or mercapto group, and as the sole effective crosslinking agent for the polymer, a radiation-sensitive transition metal carbonyl. The composition is substantially free of any compound which reacts in response to activating radiation, to form a free radical. The carbonyl may be a low M.W. compound, or a polymer whose recurring units include transition metal carbonyl groups. Alternatively the polymer to be crosslinked may itself contain such recurring units. |