| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e9ec95f75bc5dcc8f2c6f36fd3ee1ca6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N97-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02 |
| filingDate |
1974-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1976-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
GB-1430044-A |
| titleOfInvention |
Etching palladium films |
| abstract |
1430044 Etching WESTERN ELECTRIC CO Inc 18 Feb 1974 [20 Feb 1973] 7218/74 Heading B6J A palladium film with a photo-resist pattern is etched with an aqueous acidic solution containing 0À005-0À5 M of dichromate ions, 0À1-5 M of chloride ions and 0À05-5 M of hydrogen ions. The dichromate ions may be added as potassium dichromate, and the chloride and hydrogen ions as hydrochloric acid. The solution may also include from 40-75% by volume of phosphoric acid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1972373-A1 |
| priorityDate |
1973-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |