http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-1320972-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_634538388f2dd27ea0a8bc2a2032c517 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-293 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29 |
filingDate | 1970-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1973-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | GB-1320972-A |
titleOfInvention | Stripping solution |
abstract | 1320972 Etching ALLIED CHEMICAL CORP 12 Oct 1970 [13 Oct 1969 25 Sept 1970] 48420/70 Heading B6J [Also in Division C5] A stripping solution for removing organic films and deposits from e.g. silicon semi-conductors comprises at least 0À3% by weight of chromium trioxide in a solvent mixture consisting of H 2 SO 4 , 0À5 to 80% by weight of HNO 3 and 2 to 20% by weight of water, the H 2 SO 4 and HNO 3 constituting at least 75% by wt. of the solvent mixture, the said solution being free of active amounts of fluorine, chlorine and alkali and alkaline earth metals. The chromium trioxide may be added as the anhydride of chromic acid, ammonium chromate or ammonium dichromate or, subject to the quantities being non-active, as sodium or potassium chromate or dichromate. A thickener such as colloidal silica may be present. |
priorityDate | 1969-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.