| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3cd4efdf582a23a35a134a1de9b3e4b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_35c163b846f1e43382aeed8dd7bad2a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37f4922dfb7777b019e504b885211b8e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D153-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-32 |
| filingDate |
2018-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_291deb69df61f53ac7761387ace99f10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3d0cea5b0e92584412fb650fab82dab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bbff25c846a843a6bd9199a3a223b3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db9835fbc89114dcc14a5d91beed21ce |
| publicationDate |
2020-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-3085389-A1 |
| titleOfInvention |
METHOD FOR ETCHING A BLOCK COPOLYMER COMPRISING A SELECTIVE DEPOSITION STEP |
| abstract |
The invention relates to a method for etching a layer (20) of assembled block copolymer comprising first and second polymer phases (20A, 20B). This etching process comprises: - a step (S21) of selective deposition carried out by means of a first plasma so as to deposit a protective material (23) on the first polymer phase (20A) while leaving the second polymer phase intact (20B); and - a step of etching the second polymer phase (20B) selectively with respect to the protective material (23) by means of a second plasma. |
| priorityDate |
2018-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |