| abstract |
Particle detection device comprising a support, a platform (4) for accommodating particles, four beams (12.1, 12.2, 12.3, 12.4) suspending the platform (4) from the support (2), so that the platform (4 ) can be vibrated, vibration means (8) of said platform (4) at a resonant frequency, detection means (10) of displacement of the platform (4) in a direction of displacement. Each beam (12.1, 12.2, 12.3, 12.4) has a length I, a width L and a thickness e and the platform (4) has a dimension in the direction of travel of the platform and in which in an out-of-plane mode device I ≥ 10 xL and the dimension of each beam in the direction of travel of the platform (4) is at least 10 times smaller than the dimension of the platform (4) in the direction of travel. |