| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa2b4c0c7774a5d5a24bfbd77913b3cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56 |
| filingDate |
2016-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4a64d7d8dfd57c90e2c4d4f1ee6239e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b93f01fb11621928df065d563baed6b |
| publicationDate |
2017-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-3046801-A1 |
| titleOfInvention |
METHOD FOR REMOVING A METAL DEPOSIT DISPOSED ON A SURFACE IN AN ENCLOSURE |
| abstract |
The invention relates to a method of removing a metal deposit (2) disposed on a surface (5) in a chamber (1), said method comprising the repeated implementation of a sequence comprising: a) a first phase injection of chemical species adapted to oxidize said metal deposit (2); b) a second injection phase of chemical species adapted to volatilize the oxidized metal deposit, said second phase b) being implemented after the first phase a). |
| priorityDate |
2016-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |