| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-04 |
| filingDate |
2011-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d90682dca18bcf9d60f690856d16a31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79adf8de72735e567622bb125c25fc49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6e5e3dc382207b6b87fa5fe4c4c7c7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_226b0623e1fd46157094502505e2f94b |
| publicationDate |
2013-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2981940-A1 |
| titleOfInvention |
PROCESS FOR DIRECTLY BONDING A SILICON OXIDE LAYER |
| abstract |
Direct bonding process between at least a first layer (104) composed of silicon oxide and a second layer (108) of material having a hydrophilic character, comprising at least the steps of: - producing the first layer on a first substrate (102) such that the absorbance value of this first layer at a vibrational frequency of silanol bonds present in the first layer is equal to or greater than about 1.5 nm; direct bonding between the first layer and the second layer (108). |
| priorityDate |
2011-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |