http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2974818-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0aa485d286850898ac84bdb906bc1a41 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38 |
| filingDate | 2011-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10ad34bad990aec3060476093a76de49 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fec44cb6142278f913a9e75a1c079099 |
| publicationDate | 2012-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | FR-2974818-A1 |
| titleOfInvention | METHOD FOR DEPOSITING NICKEL OR COBALT METAL LAYERS ON A SOLID SEMICONDUCTOR SUBSTRATE; KIT FOR IMPLEMENTING THIS METHOD |
| abstract | The present invention relates to a kit for the deposition of nickel or cobalt in the cavities of a semiconductor substrate such as vias through (TSV) for the realization of interconnections in integrated circuits in three dimensions. The invention also relates to a metallization process of the insulating surface of such a substrate which comprises contacting the surface with a liquid aqueous solution containing: at least one metal salt of nickel or cobalt; at least one reducing agent; at least one polymer having amine functional groups, and at least one metal ion stabilizing agent; The conformity index of the nickel or cobalt layer obtained may be greater than 75%, which facilitates the subsequent filling of the vias with copper by electroplating. |
| priorityDate | 2011-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 113.