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filingDate 2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99eb370ec1b641b3a6ddfaf2138b44e8
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publicationDate 2011-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber FR-2948496-A1
titleOfInvention VIA ELECTRIC WITH A ROUGH SIDE SURFACE
abstract The invention relates to a via (23) connecting the front face to the rear face of a semiconductor substrate (W1), via via a rough side surface.
priorityDate 2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 24.