http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2947481-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5a65afd2c0d431385c1f67a0660a28e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-08148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80986
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-038
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B15-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C10-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B15-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C10-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
filingDate 2009-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46488824114e586f7b0c349432df7754
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fd657e62b8220bf9d2d5d34b19cb542
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81e8f40f57c311ba77a7da5847ef4216
publicationDate 2011-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber FR-2947481-A1
titleOfInvention SIMPLIFIED COPPER-COPPER BONDING PROCESS
abstract A method of bonding a first copper element to a second copper element comprising a step of forming an oxygen-enriched copper crystalline layer on each of the surfaces of each of the first and second elements by which the elements will be exposed. contact, the total thickness of the two layers being less than 6 nm, said step comprising: a) at least one step of polishing the surfaces so as to obtain a roughness of less than 1 nm RMS, and hydrophilic surfaces; b) at least one step of cleaning said surfaces to remove the presence of particles due to polishing and most of the corrosion inhibitors; c) a step of bringing the two oxygen-enriched copper crystalline layers into contact with each other
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016059094-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015128399-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015128399-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10390440-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9922953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3017993-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3027250-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10115698-B2
priorityDate 2009-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006052763-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008001241-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447595485
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23665710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548946
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166656
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14830
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449996336
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449973617
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID164826

Total number of triples: 57.