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publicationDate 2006-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber FR-2887245-A1
titleOfInvention PROCESS FOR THE PREPARATION OF A GAS OR MIXTURE OF GAS CONTAINING MOLECULAR FLUORINE
abstract Process for the preparation of a gas or mixture of gases containing fluorine in molecular form from a gas or mixture of gases derived from fluorine, in which the gas or mixture of fluorinated gases, in particular NF3 nitrogen trifluoride, is decomposed by cracking the fluorinated gas molecules, so as to generate a mixture of atomic fluorine and other species resulting from this cracking, said mixture then being rapidly cooled if necessary to a temperature below 500 degree C so as to cause the formation of molecular fluorine for at least 50% of the atomic fluorine formed and to minimize the recombination of the fluorine atoms with the other products resulting from cracking and thus reform a gas or mixture of fluorinated gases, the gas mixture containing fluorine F2 being recovered.
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