http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2886457-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31b1220216408a6076f55e0ba4ec1003 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31658 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 2005-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d74bed1b6b907515cc5c15c18c203a9a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c644c0b3b66f5afb1301fa9974b41f52 |
| publicationDate | 2006-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | FR-2886457-A1 |
| titleOfInvention | METHOD FOR MANUFACTURING THICKENED OXIDE LAYER STRUCTURE, ESPECIALLY ON GE OR SIG SUBSTRATE |
| abstract | The present invention relates to a method for forming a structure (50) made from semiconductor materials and comprising a substrate layer (10) and an insulating layer (40), the method comprising a step of creating said insulating layer ( 40) involving the formation of an oxidizable layer on the substrate layer and the oxidation of said oxidizable layer, characterized in that said step of creating insulating layer comprises: (a) forming a thin layer of elementary insulation (20) on the substrate layer so as to have a final thickness not exceeding 20 nm on average, (b) forming an oxidizable layer (30 ') covering said thin layer of elementary insulation (c) a thermal oxidation of said oxidizable layer (30 '), so that the joining of the layers thus formed in steps (a) and (c) constitutes said insulating layer (40) of the structure (50), said insulating layer (40) of the tructure (50) having a desired thickness. |
| priorityDate | 2005-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.