| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B2201-76 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-00 |
| filingDate |
2005-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b36beb3e026cc6eaf9a0cb67a45d443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99f11303031c8088ff2a492e28c4aef6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb374fabcee03c184486eac494a7869e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_521276402e92cf6fb340d736b2154dd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4925f746f42535ee605d4e093b748b40 |
| publicationDate |
2006-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2881913-A1 |
| titleOfInvention |
HIGHLY SENSITIVE CAPACITIVE TRANSDUCER (MICRO-MACHINING) ULTRASONIC MICRO-FACTORY |
| abstract |
A capacitive ultrasonic micromachining transducer (cMUT) comprising a lower electrode (12). In addition, the cMUT comprises a diaphragm (16) disposed in the immediate vicinity of the lower electrode (12) so that an interval having a first gap width is formed between the diaphragm (16) and the lower electrode ( 12). Alternatively, the cMUT has at least one member formed in the gap, while the at least one member is adapted to provide a second gap width between the diaphragm (16) and the lower electrode (12). . |
| priorityDate |
2004-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |