| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8292741de96a44319670508be1f78f1a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 |
| filingDate |
2002-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b42b1d6bdffaa3494f5833d60c60919 |
| publicationDate |
2004-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2846146-A1 |
| titleOfInvention |
METHOD AND INSTALLATION FOR DOPING A PATTERN OF SEVERE RESISTIVE ELEMENTS |
| abstract |
The invention relates to a method for selective doping of predetermined resistive elements of a usable electronic chip, which comprises three phases. The first phase consists in electrically and selectively charging certain elements (3) of the pattern. The second phase consists in adding dopants to the charged elements (3) according to their state of charge. The third phase consists of annealing in order to penetrate and activate the dopants. |
| priorityDate |
2002-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |