abstract |
According to the invention, a landing bearing for a vacuum pump comprises a rotor bearing ring (12) and a coaxial stator bearing ring (13) between which are arranged rolling elements (14a, 14b, 14c, 14d ) housed one after the other and coming to roll on respective rolling tracks of the rotor (12) and stator (13) bearing rings. The rolling elements comprise a succession of rolling elements whose external surface is made of zirconium dioxide. This reduces the resistance to acceleration of the landing roll, while ensuring good resistance to chemical attack by gases and process plasmas. |