| abstract |
Method and device for electron cyclotron resonance plasma deposition of single-walled carbon nanotubes, on a catalyst-free substrate, by injecting microwave power into a deposition chamber comprising a magnetic mirror confinement magnetic structure, and at least one electron cyclotron resonance zone inside or at the edge of said deposition chamber and facing said substrate, whereby, under a pressure of less than 10-3 mbar, dissociation and / or dissociation is caused. ionizing a carbon-containing gas in said magnetic mirror at the center of the deposition chamber, producing species which will deposit on said substrate which is heated; process in which the surface of the substrate has reliefs and / or hollows. Single-walled nanotubes (SWNT) thus obtained. |