| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-213 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0641 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J4-04 |
| filingDate |
2000-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab781b1d9797fc6282e433e6993703ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6d8f7ce8900833872beaf8fb60984fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_054f28dd62adfbc0ee347773ccdecf27 |
| publicationDate |
2002-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2812941-A1 |
| titleOfInvention |
METHOD FOR REAL-TIME MONITORING OF THE ELABORATION OF A THIN-FILM STRUCTURE BY ELIPSOMETRIC MEASUREMENT |
| abstract |
Process for real-time control of the development of a thin-film structure comprising a substrate by ellipsometric measurement in which: - variables directly related to the ellipsometric ratio rho = tg PSI exp (iDELTA) are measured, - said variables are compared to reference values. The comparison relates to the length of the trajectory traveled at an instant t in the space of the variables compared to an initial point at the instant t0, for each layer participating in the structure in thin layers. |
| priorityDate |
2000-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |