| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8292741de96a44319670508be1f78f1a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02183 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
1999-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_961bf17b332fcca11c0d2c1e14a1efd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebe573763f81f00e4b0aafbfbf4dd9c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68c51a0cc2d29c821a7f565b9a633418 |
| publicationDate |
2001-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2801426-A1 |
| titleOfInvention |
INTEGRATED CAPACITY WITH MIXED DIELECTRIC |
| abstract |
The invention relates to a method for manufacturing a capacitor (20) integrated on a silicon substrate (10), comprising a step of depositing a layer (1) of the first electrode, a step of depositing a layer of dielectric (2), and a step of depositing a second electrode layer (3). According to the invention, the step of depositing the dielectric layer comprises depositing a homogeneous combination of the molecules of at least two dielectrics having permittivities (epsilon) evolving in opposite directions as a function of the electric field, the proportion of each dielectric in the combination being chosen so that the capacitance has a linearity in satisfactory voltage. |
| priorityDate |
1999-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |