| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_526cb931f1382d6e016ee651d55e1365 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C251-66 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C251-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F4-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F4-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 |
| filingDate |
2000-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_796b3a1c5b2cd660a6ddb9e3ba0a4893
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60f3e37e1e64aefd4e02721005c010c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee40ce68d3315e15ea938c010246647b |
| publicationDate |
2000-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2795411-A1 |
| titleOfInvention |
9-ANTHRALDEHYDEOXIM (METH) ACRYLATES, PREPARATION METHOD AND POLYMERS THAT THEY PREPARE |
| abstract |
The invention relates to 9-anthraldehydeoximacrylate corresponding to the following formula (CF DRAWING IN BOPI) and 9-anthraldehydeoximméthacrylate corresponding to the following formula: (CF DRAWING IN BOPI) their manufacturing processes as well as the polymers which they allow to prepare . Such polymers can serve as a useful ARC substance for submicrolithography processes using KrF at 248nm, ArF at 193nm and F2 at 157nm lasers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2802935-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2808027-A1 |
| priorityDate |
1999-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |