| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_526cb931f1382d6e016ee651d55e1365 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2000-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_796b3a1c5b2cd660a6ddb9e3ba0a4893
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e061a78336c37d5ceb9edbf2650de122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2b9a7b2afbe45b672fa41b3cbd430c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf90fc148d51b000194789d366cd969d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee40ce68d3315e15ea938c010246647b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60f3e37e1e64aefd4e02721005c010c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_724a2d9e3d289bb02983be26f58028f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef76ec96cd5d503d55e1e726a29c042b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ae7fc43d514eb7fd1b3220168fb2d34 |
| publicationDate |
2000-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2794538-A1 |
| titleOfInvention |
COVERING COMPOSITION FOR PHOTORESIST AND METHOD FOR FORMING A FINE PATTERN USING THE SAME |
| abstract |
The invention relates to a top coating composition protecting against contamination by amines for a photoresist. According to the invention, it comprises a top coating composition and a basic compound. The invention applies in particular to the manufacture of semiconductor devices. |
| priorityDate |
1999-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |