| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_30e2289d56ce79ad2ee90bcf5048df0c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-152 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-2453 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-089
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-093
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/E06B9-24 |
| filingDate |
1998-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54e7a0aeb23b8f0eacdc3cb66add51ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c12a3e7ecb535d27e4d55d88aa694a4c |
| publicationDate |
1999-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2780054-A1 |
| titleOfInvention |
METHOD FOR DEPOSITING A METAL OXIDE-BASED LAYER ON A GLASS SUBSTRATE, A GLASS SUBSTRATE THUS COATED |
| abstract |
The invention relates to a method for depositing a metal oxide-based layer containing fluorine, in particular a layer of tin oxide doped with fluorine SnO2: F, on a glass substrate by a phase pyrolysis technique. gaseous from at least two precursors including at least one metal precursor and at least one fluorine precursor. According to the invention, the fluorine precursor comprises nitrogen trifluoride NF3. |
| priorityDate |
1998-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |